Air preparation equipment (FRL) < DIGITAL CATALOG Ver.5.0

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Clean system equipment


	Actuator

	Valves

	Air preparation equipment

	Auxiliary equipment

Electric actuator

ECO Equipment

Static electricity removing unit

Fluororesin equipment

Constant delivery pump

Air preparation equipment (FRL)

Clean System Multi Series Filter Regulator FR Series

Clean System Multi Series Filter Regulator FR Series

Clean System Multi Series Filter F Series

Clean System Multi Series Filter F Series

Clean System Multi Series Mist Filter MF Series

Clean System Multi Series Mist Filter MF Series

Clean System Multi Series Micro Mist Filter MMF Series

Clean System Multi Series Micro Mist Filter MMF Series

Clean System Multi Series Regulator R Series

Clean System Multi Series Regulator R Series

Clean System Multi Series Precision Regulator PR Series

Clean System Multi Series Precision Regulator PR Series

Clean System Clean Line Filter CLF Series

·The filtration membrane uses a PTFE membrane and PTFE non-woven fabric in a dual-layer structure that assures stable performance; and guarantees a collecting efficiency of 100% for microscopic particles of 0.01mm.
·The component is performed precision cleaning inside of the clean rooms.Because few microscopic particles become adhered to it; a quick response is achieved.

Clean System Clean Line Filter CLF Series

Clean System Stainless Regulator RS Series

·Optimum for foodstuff-related lines that require corrosion resistance; and for other lines with non-oil and non-grease requirements for such applications as solvents in liquid crystal and semiconductor-related processes; carrier gas pressure control in clean water circuits; blow pressure control; and clean air and gas pressure control.

Clean System Stainless Regulator RS Series

Clean System Precision Stainless Regulator PRS Series

·Allows high-precision settings (0.001MPa) for carrier gas pressure control; blow pressure control; clean air and gas pressure control; etc.; for all kinds of solvents and clean water circuits used in liquid crystal and semiconductor-related processes.

Clean System Precision Stainless Regulator PRS Series